JPH0155593B2 - - Google Patents
Info
- Publication number
- JPH0155593B2 JPH0155593B2 JP958383A JP958383A JPH0155593B2 JP H0155593 B2 JPH0155593 B2 JP H0155593B2 JP 958383 A JP958383 A JP 958383A JP 958383 A JP958383 A JP 958383A JP H0155593 B2 JPH0155593 B2 JP H0155593B2
- Authority
- JP
- Japan
- Prior art keywords
- copper
- thin film
- chromium
- substrate
- adhesion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010949 copper Substances 0.000 claims description 21
- 239000011651 chromium Substances 0.000 claims description 20
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 14
- 239000010410 layer Substances 0.000 claims description 14
- 229910052802 copper Inorganic materials 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 11
- 229910052804 chromium Inorganic materials 0.000 claims description 11
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 10
- 239000004020 conductor Substances 0.000 claims description 10
- 229910052763 palladium Inorganic materials 0.000 claims description 6
- 239000012790 adhesive layer Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 description 13
- 239000010408 film Substances 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 150000001844 chromium Chemical class 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
Landscapes
- Parts Printed On Printed Circuit Boards (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP958383A JPS59135792A (ja) | 1983-01-24 | 1983-01-24 | 導体配線基板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP958383A JPS59135792A (ja) | 1983-01-24 | 1983-01-24 | 導体配線基板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59135792A JPS59135792A (ja) | 1984-08-04 |
| JPH0155593B2 true JPH0155593B2 (en]) | 1989-11-27 |
Family
ID=11724331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP958383A Granted JPS59135792A (ja) | 1983-01-24 | 1983-01-24 | 導体配線基板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59135792A (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012086315A (ja) * | 2010-10-20 | 2012-05-10 | Nippon Telegr & Teleph Corp <Ntt> | 微細可動構造体の製造方法および微細可動構造体 |
-
1983
- 1983-01-24 JP JP958383A patent/JPS59135792A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59135792A (ja) | 1984-08-04 |
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